PFEIFFER TPH60 Tph Turbomolecular Pump

( Brand: Pfeiffer ), ( Manufacturer Part Number: TPH60 ), ( Part Type: Pump ), ( Inlet Flange: Iso 63 ), ( Unit Type: Unit ), ( Maximum Flow Rate: 56 L/s ), ( Outlet Flange: Kf-16 ), ( Country Of Origin: Germany )

Review PFEIFFER Tph 60 Turbomolecular Pump

The Pfeiffer TPH 60 (Turbomolecular Pump) is a high-performance, oil-free vacuum solution engineered for demanding applications in research, semiconductor manufacturing, and advanced materials processing. Part of Pfeiffer Vacuum s renowned TPH series, this turbomolecular pump delivers exceptional pumping speed and reliability while maintaining ultra-high vacuum (UHV) conditions with minimal maintenance requirements. With a nominal pumping speed of 60 liters per second for nitrogen (N ) at an ultimate pressure of less than **1 10 mbar**, the TPH 60 excels in environments where contamination-free operation and long-term stability are critical. Its compact yet robust design incorporates a multi-stage turbine rotor assembly, featuring precision-machined ceramic or metal bearings, which ensure smooth operation and extended service life without the need for lubricants. The pump s advanced gas dynamics, combined with a high-efficiency compressor, allow it to handle a wide range of gases, including reactive and corrosive substances, while maintaining consistent performance across varying pressure regimes.

The TPH 60 is equipped with Pfeiffer s proprietary **Turboclean** technology, which minimizes the risk of gas ingestion and backstreaming, making it ideal for applications where purity is paramount, such as in thin-film deposition, electron microscopy, or surface science experiments. Its modular construction allows for easy integration into existing vacuum systems, with standard flange sizes (e.g., CF 100 or ISO 160) ensuring compatibility with a broad range of chambers and components. The pump s control interface is intuitive, offering real-time monitoring of key parameters such as pressure, speed, and temperature, while its silent operation thanks to optimized rotor dynamics reduces noise levels, contributing to a more ergonomic workspace. Additionally, the TPH 60 is designed with energy efficiency in mind, featuring a variable speed drive that adjusts power consumption based on operational demands, further enhancing its cost-effectiveness over time.

For applications requiring even greater reliability, the TPH 60 can be paired with Pfeiffer s **Vacuum Gauges and Controllers**, such as the **IQ series** or **BARATRON **, to provide precise pressure feedback and automated system management. Its robust construction, utilizing high-grade materials resistant to thermal and mechanical stress, ensures durability in both laboratory and industrial settings. Whether used in academic research, semiconductor fabrication, or specialized manufacturing processes, the Pfeiffer TPH 60 turbomolecular pump sets a new standard for performance, efficiency, and contamination-free vacuum generation, making it an indispensable tool for professionals demanding the highest standards of precision and reliability.

### **Pros and Cons of Buying a Pfeiffer TPH 60 Turbomolecular Pump**

1. **High Performance and Efficiency** The TPH 60 is designed for high vacuum applications, offering excellent pumping speed (up to 60 liters per second for nitrogen) and low ultimate pressure (down to 1 10 mbar). This makes it suitable for research, semiconductor manufacturing, and other precision vacuum applications.

2. **Reliability and Durability** Pfeiffer is a well-established manufacturer with a strong reputation for building robust, long-lasting turbomolecular pumps. The TPH series is known for its stable operation and minimal downtime, especially when properly maintained.

3. **Energy Efficiency** Compared to older turbopump models, the TPH 60 incorporates energy-saving features, such as variable speed control and optimized motor design, reducing power consumption while maintaining performance.

4. **Compatibility with Forepumps** The TPH 60 can be paired with various forevacuum pumps (e.g., dry screw pumps like the Pfeiffer HiPace or oil-free pumps), offering flexibility in system design. This is particularly useful in applications where oil contamination must be avoided.

5. **Low Maintenance Requirements** Unlike oil-sealed pumps, turbomolecular pumps have fewer moving parts exposed to wear, reducing the need for frequent oil changes or mechanical adjustments. The TPH 60 s sealed rotor design minimizes contamination risks.

6. **Quiet Operation** Turbomolecular pumps are generally quieter than other high-vacuum pumps (e.g., diffusion pumps), making them suitable for laboratory or cleanroom environments where noise is a concern.

- **Semiconductor processing** (etching, deposition)

- **Research and development** (UHV, surface science)

- **Medical and pharmaceutical applications** (sterile environments)

- **Aerospace and materials testing**

8. **Modular and Scalable** Pfeiffer offers accessories like gas ballasts, pressure controllers, and interface modules, allowing customization for specific applications.

9. **Long Lifespan** With proper care, turbomolecular pumps like the TPH 60 can last **10 years**, making them a cost-effective long-term investment.

10. **Support and Warranty** Pfeiffer provides comprehensive technical support, spare parts availability, and warranty coverage, ensuring minimal disruption in case of issues.

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1. **High Initial Cost** The TPH 60 is a premium product, with prices ranging from **$20,000 to $40,000 ** depending on configuration, accessories, and regional pricing. This can be a significant investment for small labs or startups.

2. **Dependence on Forepump Performance** The turbopump s efficiency is directly tied to the forevacuum system. If the forevacuum pump (e.g., dry screw pump) is underperforming, the TPH 60 may struggle to achieve optimal pressure, leading to inefficiencies or system failures.

3. **Sensitivity to Contaminants** While turbomolecular pumps are generally cleaner than oil-based pumps, they are not immune to particulate or chemical contamination. Ingress of dust, vapors, or corrosive gases can damage the rotor blades or bearings over time.

4. **Limited Self-Starting Capability** Unlike some dry pumps, turbomolecular pumps **cannot start from atmospheric pressure** they require a roughing pump to reduce pressure to a safe level ( 10 mbar) before activation. This adds complexity to system startup.

5. **Noise at Low Pressures** While generally quieter than diffusion pumps, the TPH 60 can produce noticeable noise at very low pressures (e.g.,

6. **Power Consumption at High Speeds** While energy-efficient, the TPH 60 can draw significant power (up to **1.5 2.5 kW**) when operating at full speed, which may impact facility electrical loads.

7. **Maintenance Costs Over Time** While lower than oil-sealed pumps, turbomolecular pumps require periodic **rotor blade inspections, bearing lubrication (if applicable), and gas ballast adjustments**, which add to long-term operational costs.

8. **Complex Installation and Commissioning** Proper installation, alignment, and leak testing are critical for optimal performance. Improper setup can lead to reduced lifespan or inefficiencies, requiring specialized expertise.

9. **Limited Availability of Spare Parts** While Pfeiffer has a strong supply chain, some older or discontinued models may have limited spare parts availability, potentially increasing downtime if a critical component fails.

10. **Not Ideal for Extreme Conditions** The TPH 60 is not designed for **high-temperature environments, aggressive chemicals, or cryogenic applications** without additional safeguards. For such cases, specialized pumps (e.g., cryopumps or magnetically levitated turbopumps) may be required.

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The **Pfeiffer TPH 60 turbomolecular pump** is a **high-quality, reliable, and efficient** choice for applications requiring **ultra-high vacuum (UHV) or high vacuum (HV)** with minimal maintenance. Its **superior performance, energy efficiency, and compatibility with modern vacuum systems** make it a preferred option for **semiconductor manufacturing, research labs, and cleanroom environments**.

However, the **high upfront cost, dependency on forevacuum systems, and sensitivity to contaminants** must be carefully considered. It is **not the best fit for budget-conscious applications, environments with frequent pressure swings, or settings where oil-free pumps are mandatory without proper integration**.

For **small labs or startups**, a **less expensive alternative** (e.g., a **Pfeiffer HiPace dry screw pump paired with a smaller turbopump**) might be more practical. For **large-scale industrial or research applications**, the TPH 60 represents a **strong long-term investment** in vacuum performance and reliability.

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- You require **ultra-high vacuum (UHV) or high vacuum (HV)** for **semiconductor processing, surface science, or precision manufacturing**.

- Your budget allows for a **premium vacuum solution** with **low maintenance and long lifespan**.

- You can **properly integrate it with a compatible forevacuum system** (e.g., Pfeiffer HiPace dry screw pump).

- Your application **benefits from quiet, oil-free operation** and **minimal contamination risks**.

- You need a **lower-cost solution** (e.g., **Edwards RV or Leybold Turbovac**).

- Your system requires **frequent pressure cycling or harsh environments** (consider **cryopumps or magnetically levitated turbopumps**).

- You are working in a **resource-constrained lab** where maintenance expertise is limited.

**Final Verdict:** The **TPH 60 is one of the best turbomolecular pumps** for professional, high-demand vacuum applications, but its **high cost and specific requirements** mean it is not universally suitable. **Thoroughly assess your needs before purchasing**, and consult with a **vacuum system integrator** to ensure proper pairing with forevacuum and ancillary equipment.

Details:

Fore line: KF 16. Pumping speed: 56 L/s for N. Space simulation setups. Inlet flange: ISO 63 ISO K.

Plasma and nuclear physics. Previous use in atmospheric gas research and was working fine when the apparatus disassembled:: model: TPH 060. Electron microscopy. Research labs.

Thin film deposition. Permanent magnetic bearing upper. Oil lubricated ceramic bearing lower. Pfeiffer-Blazers turbomolecular pump.

part #: tph60 prices

• $750.00-$14900.00

specifications valvplu:

• brand: Pfeiffer
• mpn: Tph60
• part type: Pump
• inlet flange: Iso 63
• unit type: Unit
• maximum flow rate: 56 L/s
• outlet flange: Kf-16
• country of origin: Germany

general valvplu:

• Pumps Pump Accessories > Vacuum Pumps > Turbomolecular Pumps
• condition: Used

offer valvplu:

• best offers: True
• quantity: 1
• sold: 0
• options: Ship-to-home
• availability: In Stock
• started: March 28, 2026

shipping valvplu:

• transit: 5-11 Days
• carrier: USPS
• type: Fixed
• cost: $8.16
• service: USPS Ground Advantage
• class: Standard

seller valvplu:

• rating: 0.0%
• # reviews: 4
• city: Boone, North Carolina

payments valvplu:

• other
• credit card: Discover
• wallet: Apple-pay

returns valvplu:

• policy: No Returns

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