MKS 104230002 Cathode Vacuum Pressure Sensor

( Brand: Mks ), ( Manufacturer Part Number: 104230002 ), ( Type: Vacuum ), ( Country Of Origin: United States )

Review MKS Instruments Cathode Vacuum Pressure Sensor

The **MKS Instruments 104230002 Cathode Vacuum Pressure Sensor** is a high-performance, cold cathode ionization gauge designed for precise and reliable measurement of ultra-high vacuum (UHV) and high vacuum (HV) environments, making it an indispensable tool in semiconductor manufacturing, thin-film deposition, surface science research, and other critical applications requiring exceptional accuracy and stability. This sensor operates on the principle of cold cathode ionization, where a high-voltage discharge ionizes residual gas molecules in the vacuum chamber, generating a measurable ion current proportional to the gas density. The 104230002 features a robust **10-inch (254 mm) flange** compatible with the industry-standard **ConFlat (CF) flange system**, ensuring seamless integration into existing vacuum systems while maintaining an ultra-clean interface to prevent contamination. Constructed from high-purity materials, including a **stainless steel housing** and a **ceramic-insulated cathode assembly**, the sensor is engineered to withstand the harsh conditions of vacuum processing, including exposure to corrosive gases, thermal cycling, and prolonged operation in demanding environments.

At the heart of the 104230002 lies a **dual-cathode design**, which enhances sensitivity and stability by reducing the risk of cathode poisoning a common issue in vacuum gauges exposed to reactive gases like oxygen or water vapor. The sensor s **electrically isolated cathode** minimizes the risk of arcing and ensures consistent performance over extended periods, even in environments with fluctuating gas compositions. The gauge s **wide dynamic range**, spanning from **1 10 to 1 10 Torr (10 to 10 Pa)**, allows for accurate measurement across multiple vacuum regimes, from the deepest UHV conditions to rougher high-vacuum environments. This versatility is further complemented by the sensor s **fast response time**, enabling real-time monitoring of pressure changes with minimal lag, which is crucial for processes requiring precise control, such as sputtering, chemical vapor deposition (CVD), or molecular beam epitaxy (MBE).

The 104230002 is equipped with a **highly sensitive Faraday cup** for ion collection, ensuring accurate ion current measurement with minimal noise and drift. The sensor s **digital output interface** (via the optional **MKS 104230002-01 Digital Output Module**) provides users with precise, analog or digital signals for integration into control systems, data acquisition setups, or process monitoring software. Additionally, the gauge includes **built-in diagnostics**, such as cathode health monitoring and automatic calibration checks, which help maintain optimal performance and reduce downtime. The sensor s **low outgassing characteristics** and **compatibility with cryopumping and turbomolecular pumping systems** make it an ideal choice for applications where minimizing background contamination is critical.

For enhanced user convenience, the 104230002 is designed with **easy-to-read analog and digital displays** (when paired with compatible controllers) and features a **user-friendly interface** for configuration, calibration, and troubleshooting. The sensor s **modular design** allows for flexible integration into custom vacuum systems, while its **compliance with industry standards** including ISO, ASTM, and Vacuum Metallurgy Association (VMA) guidelines ensures reliability and traceability in regulated environments. Whether deployed in a semiconductor fabrication line, a research laboratory, or an industrial vacuum processing facility, the MKS 104230002 delivers unmatched precision, durability, and operational efficiency, making it a cornerstone of modern vacuum measurement technology.

### Pros and Cons of buying a MKS 104230002 Cathode Vacuum Pressure Sensor

1. **High Precision and Accuracy** The MKS 104230002 is known for its high-resolution measurements, making it ideal for applications requiring precise vacuum control, such as semiconductor manufacturing, thin-film deposition, or research laboratories.

2. **Wide Measurement Range** It covers a broad pressure range, from ultra-high vacuum (UHV) to rough vacuum, depending on the configuration, which makes it versatile for various applications.

3. **Reliability and Durability** MKS Instruments is a well-established brand in vacuum technology, and this sensor is designed for long-term use in demanding environments, reducing the need for frequent replacements.

4. **Compatibility with MKS Systems** If you already use other MKS controllers or vacuum systems, this sensor integrates seamlessly, simplifying setup and maintenance.

5. **Low Outgassing** The sensor is designed to minimize outgassing, which is critical in applications where contamination must be avoided, such as in semiconductor fabrication.

6. **Fast Response Time** The sensor provides quick readings, which is beneficial in dynamic vacuum processes where real-time monitoring is necessary.

7. **Calibration Stability** MKS sensors are known for maintaining calibration over extended periods, reducing the need for frequent recalibration.

8. **Support and Warranty** MKS offers technical support and warranty coverage, ensuring assistance in case of issues or failures.

---

1. **High Initial Cost** Like many high-precision industrial sensors, the MKS 104230002 is relatively expensive, which may be a barrier for smaller labs or budget-conscious buyers.

2. **Complex Installation** Proper installation requires expertise, especially when integrating it with existing vacuum systems. Incorrect setup can lead to inaccurate readings or system malfunctions.

3. **Maintenance Requirements** While durable, the sensor may require periodic maintenance, such as cleaning or recalibration, which can add to long-term operational costs.

4. **Limited Availability of Spare Parts** Depending on the region, finding replacement parts or compatible accessories may be challenging, potentially leading to downtime if issues arise.

5. **Learning Curve for Operation** Users unfamiliar with vacuum sensors or MKS systems may need training to operate and interpret the sensor s data effectively.

6. **Potential for Drift Over Time** Although MKS sensors are generally stable, long-term use in harsh environments (e.g., high temperatures or chemical exposure) may cause gradual drift in readings.

7. **Compatibility Issues with Non-MKS Systems** If you re using non-MKS controllers or interfaces, additional adapters or software may be required, adding complexity and cost.

---

The MKS 104230002 is a high-quality, precision vacuum pressure sensor well-suited for professional applications where accuracy, reliability, and integration with MKS systems are critical. Its strengths lie in its performance, durability, and compatibility with advanced vacuum environments. However, its high cost, complexity, and maintenance needs may make it less ideal for small-scale or budget-limited setups.

- **Buy if:** You require a high-precision, long-term vacuum sensor for professional applications (e.g., semiconductor manufacturing, research labs, or industrial processes) and can justify the investment. Ensure your team has the expertise to install and maintain it.

- **Avoid if:** You are working on a tight budget, need a simpler or lower-cost alternative, or lack the technical resources to properly integrate and service the sensor. In such cases, consider lower-cost options like capacitance manometers or piezoelectric sensors, depending on your specific requirements.

- **Consider alternatives:** If cost is a concern, explore other MKS models (e.g., the 104230001) or reputable competitors like Pfeiffer Vacuum or Leybold, which may offer similar performance at different price points. Always evaluate your specific needs before purchasing.

Details:

If you want something checking out I can do some research as well. I buy consignment stuff, never know what am going to get and only have limited knowledge about my stuff. I will answer questions to the best of my technical abilities which is reasonably good being a degrees engineer. Please let me know if I have incorrectly described or identified the item.

SHIPPING NOTE - I try to do my best in selecting the correct weights and sizes will work make deal. Over $5000 raised in 2025. Be sure the item is what you want before purchasing. Please study the pictures and before buying, ask questions if you are unclear about anything.

USPS rates are what they and in my opinion overpriced.

part #: 104230002 prices

• $118.99-$425.98

specifications valvplu:

• brand: Mks
• mpn: 104230002
• type: Vacuum
• country of origin: United States

payments valvplu:

• other
• credit card: Mastercard
• wallet: Apple-pay

offer valvplu:

• quantity: 1
• best offers: True
• options: Ship-to-home
• sold: 0
• availability: In Stock
• started: June 11, 2026

returns valvplu:

• policy: Returns Accepted
• paid by: Buyer
• method: Money back
• time: 14 Days

general valvplu:

• condition: Used
• Pumps Pump Accessories > Vacuum Pumps > Other Vacuum Pumps

seller valvplu:

• rating: 99.6%
• city: Blanchard, Oklahoma
• # reviews: 321

shipping valvplu:

• cost: $16.85
• class: Expedited
• carrier: USPS
• transit: 4-7 Days
• type: Calculated
• service: USPS Priority Mail

Mks 104230002 Is Similar To:

• 100313714 Mks Hps Rev High Vacuum Reducer Adapter To Sst (37.5% similar) I live in two different cities. I try to schedule offers end when am where the item is. Shipping prices quoted are for the contiguous USA. Feel free to ask any questions...(November 10th, 2018)
• 100314603 Mks Instruments High Vacuum Tee Used (56.9% similar) Stainless steel type same size flanges all ports standard modulus. Removed from a working unit and appear to be in great condition ISO KFC tee Mks...(March 26th, 2018)
• 100314805 Mks Instruments Vacuum Cross Series Used Working (56.1% similar) Serial numbers or country of manufacture may vary. Mks instruments ISO-KFC vacuum cross NW40 series 31 used working inventory CONF-579 this is surplus. For lift gate service and pictured test equipment is not included or available sale. Specifications part no: model series 31 flange: NW40 sale ...(April 16th, 2018)
• 100760110 Mks Vacuum Flange Blank Ss Centering Ring Seal (30.4% similar) This Mks NW100 vacuum flange blank 304 ss with centering ring seal is new and unused, still sealed under plastic, as shown. Approximate overall unpacked dimensions: 8 l x 7 w all offered products are sold as advertised, is and without warranty. No software, power cords, or other accessories are ...(July 31st, 2018)
• 103250019 Mks Vacuum Control Moducell (28% similar) Mks vacuum control module removed from working equipment at large mfg company undergoing inventory reduction retiring items no longer needed. Do not attempt to fix item yourself...(July 22nd, 2018)
• 1159b-00100rk Mks Instruments Mass Flow Controller Sccm Used Working (41.9% similar) Mks instruments 1159B-00100RK mass flow controller 100 scam n2 used working inventory this is surplus. Serial numbers or country of manufacture may vary. The physical condition is good, but there are signs of previous use and handling. Specifications part no: 1159B-00100RK range gas: 100 scam, n2 ...(November 6th, 2018)
• 1179a21cr1bv Mks Instruments Mass Flow Controller Mfc Sccm Used Working (40.9% similar) Specifications part no: 1179A21CR1BV model type 1179A range gas: 20 scam, n2 interface: 15-PINCONNECTOR: 4VCR may require calibration Ce marked sale details item condition: used working, 90 day warranty estimated packed shipping dimensions: l x w8 x8 3 lbs. Mks instruments 1179A21CR1BV mass flow ...(July 6th, 2018)
• 120aa-000.1raj Mks Instruments Baratron Capacitance Manometer Used Working (46.2% similar) Pictured test equipment is not included or available for sale. Serial numbers or country of manufacture may vary. 1RAJ baritone capacitance manometer used working is surplus. Only items pictured are included: if a part is not pictured, or mentioned above, then it included in the sale. 1RAJ model no...(March 14th, 2018)
• 122aa-00001bb Mks Instruments Baratron Pressure Transducer Torr Used Working (53% similar) The physical condition is good, but there are signs of previous use and handling. Only items pictured are included: if a part is not pictured, or mentioned above, then it included in the sale. Specifications part no: 122AA-00001BB model type 122A range: 100 tore interface: Mks 5-PIN terminal strip ...(July 6th, 2018)
• 122ba-00010ad Mks Baratron Pressure Vacuum (36.7% similar) Shipping information us. This listing is for 1 used Mks baritone pressure vacuum Gage transducer model 122BA-00010AD. Condition: used, working when removed from Lab vacuum system. 10 tore range. Send your questions before purchasing...(January 20th, 2018)
• 124aa-00100bb Mks Instruments Baratron Type Torr Vacuum Pressure Switch (59.8% similar) All parts, including accessories and cables are only included if pictured or listed in the. Compatibility issues are not considered DOA. DOA stands for dead on arrival, meaning that the item did not function properly when it arrived. Do not discard the packaging. Mks instruments baritone 124AA-...(September 11th, 2018)